Nanoimaging with a compact extreme-ultraviolet laser

G Vaschenko; F Brizuela; C Brewer; M Grisham; H Mancini; C S Menoni; M C Marconi; J J Rocca; W Chao; J A Liddle; E H Anderson; D T Attwood; A V Vinogradov; I A Artioukov; Y P Pershyn; V V Kondratenko

doi:10.1364/ol.30.002095

Nanoimaging with a compact extreme-ultraviolet laser

Opt Lett. 2005 Aug 15;30(16):2095-7. doi: 10.1364/ol.30.002095.

Authors

G Vaschenko¹, F Brizuela, C Brewer, M Grisham, H Mancini, C S Menoni, M C Marconi, J J Rocca, W Chao, J A Liddle, E H Anderson, D T Attwood, A V Vinogradov, I A Artioukov, Y P Pershyn, V V Kondratenko

Affiliation

¹ National Science Foundation Engineering Research Center for Extreme Ultraviolet Science and Technology, and Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, Colorado 80523, USA. vaschen@engr.colostate.edu

PMID: 16127921
DOI: 10.1364/ol.30.002095

Abstract

Images with a spatial resolution of 120-150 nm were obtained with 46.9 nm light from a compact capillary-discharge laser by use of the combination of a Sc-Si multilayer-coated Schwarzschild condenser and a free-standing imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology.

Publication types

Evaluation Study

MeSH terms

Equipment Design
Equipment Failure Analysis
Image Enhancement / instrumentation*
Image Enhancement / methods
Image Interpretation, Computer-Assisted / instrumentation
Image Interpretation, Computer-Assisted / methods*
Lasers*
Microscopy, Confocal / instrumentation*
Microscopy, Confocal / methods
Nanotechnology / instrumentation*
Nanotechnology / methods
Signal Processing, Computer-Assisted / instrumentation*
Ultraviolet Rays*