DNA microarray, which exploits the preferential binding of complementary single stranded nucleic acids, is a powerful tool for obtaining high-throughput characterization of gene expression. Although this system is evolving rapidly, low-reproducibility of hybridization data is a major drawback to be overcome. Here, we developed additional surface modification step to reduce the hydrolysis of silyl ether bond between glass surface and linker molecule. In addition, we designed functional DNA probe for reducing the chemical treatments of glass surface. These surface/probe modifications will be helpful in fabricating more efficient DNA microarray system.