Suspended mechanical structures based on elastic silicon nanowire arrays

Nano Lett. 2007 Apr;7(4):1100-4. doi: 10.1021/nl062877n. Epub 2007 Mar 22.

Abstract

We demonstrate a bottom-up/top-down combined method for the fabrication of horizontally suspended, well-oriented and size-controlled Si nanowire arrays. Mechanical beamlike structures composed of multiple ordered arrays consecutively linked by transversal microspacers are obtained by this method. Such structures are used to investigate the mechanical elasticity of the nanowire arrays by atomic force microscopy. Our results point out important differences in the morphology and mechanical behavior of the fabricated nanowire-based structures with respect to equivalent bulk material structures.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Crystallization / methods*
  • Elasticity
  • Electric Wiring
  • Macromolecular Substances / chemistry
  • Materials Testing
  • Mechanics
  • Molecular Conformation
  • Nanostructures / chemistry*
  • Nanostructures / ultrastructure*
  • Nanotechnology / methods*
  • Particle Size
  • Semiconductors
  • Silicon / chemistry*
  • Stress, Mechanical
  • Surface Properties

Substances

  • Macromolecular Substances
  • Silicon