Laser scanning thermoreflectance imaging system using galvanometric mirrors for temperature measurements of microelectronic devices

Rev Sci Instrum. 2007 Jul;78(7):074902. doi: 10.1063/1.2757473.

Abstract

We present a thermoreflectance imaging system using a focused laser sweeping the device under test with a scanner made of galvanometric mirrors. We first show that the spatial resolution of this setup is submicrometric, which makes it adapted to microelectronic thermal measurements. Then, we studied qualitative temperature variations on two dissipative structures constituted of thin (0.35 microm) dissipative resistors, the distance between two resistors being equal to 0.8 or 10 microm. This technique combines sensitivity and speed: it is faster than a point classical thermoreflectance technique and, in addition, more sensitive than a charge-coupled device thermoreflectance imaging technique.

Publication types

  • Evaluation Study
  • Research Support, Non-U.S. Gov't

MeSH terms

  • Electronics*
  • Equipment Design
  • Equipment Failure Analysis / instrumentation*
  • Equipment Failure Analysis / methods
  • Lasers*
  • Optics and Photonics / instrumentation*
  • Reproducibility of Results
  • Sensitivity and Specificity
  • Signal Processing, Computer-Assisted / instrumentation*
  • Thermography / instrumentation*
  • Thermography / methods