DNA microarray has become one of the most indispensable tools for genome analysis, medical diagnosis and molecular biological studies. In this study, to make DNA microarray more reliable and efficient, we employed additional silanization modification on aminoalkoxysilane-treated surface. In addition, oxanine was used as a linker of DNA probe, which does not require any chemical activation step in probe immobilization. These strategies were practically convenient in DNA microarray fabrication, and the newly developed system showed enhanced stability for the immobilized DNA probes that could be useful for quantitative analysis.