On-wafer crystallization of ultralow-kappa pure silica zeolite films

Angew Chem Int Ed Engl. 2009;48(26):4777-80. doi: 10.1002/anie.200900461.

Abstract

A higher goal: An on-wafer crystallization process to prepare pure silica zeolite (PSZ) MEL-type films that is superior to the previously used hydrothermal process is reported. These striation-free MEL-type films (right, see picture) outperform the traditional spin-on films (left) in terms of the kappa value, mechanical properties, surface roughness, mesopore size, and size distribution.