A novel and environmental friendly method was developed to prepare transparent, uniform, crack-free and visible light activated nitrogen doped (N-doped) titania thin films without the use of organic Ti precursors and organic solvents. The N-doped titania films were prepared from heating aqueous peroxotitanate thin films deposited uniformly on superhydrophilic uncoated glass substrates. The pure glass substrates were superhydrophilic after being heated at 500 degrees C for 1 h. Nitrogen concentrations in the titania films were adjusted by changing the amount of ammonia solution. The optimal photocatalytic activity of the N-doped titania films was about 14 times higher than that of a commercial self-cleaning glass under the same visible light illumination. The current reported preparative technique is generally applicable for the preparation of other thin films.