An integrated microfluidic chip with 40 MHz lead-free transducer for fluid analysis

Rev Sci Instrum. 2011 Feb;82(2):024903. doi: 10.1063/1.3553575.

Abstract

The design, fabrication, and evaluation of a high-frequency transducer made from lead-free piezoceramic for the application of microfluidic analysis is described. Barium strontium zirconate titanate [(Ba(0.95)Sr(0.05))(Zr(0.05)Ti(0.95))O(3), abbreviated as BSZT] ceramic has been chosen to be the active element of the transducer. The center frequency and bandwidth of this high-frequency ultrasound transducer have been measured to be 43 MHz and 56.1%, respectively. The transducer was integrated into a microfluidic channel and used to measure the sound velocity and attenuation of the liquid flowing in the channel. Results suggest that lead-free high-frequency transducers could be used for in situ analysis of property of the fluid flowing through the microfluidic system.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Alcohols / chemistry
  • Ceramics / chemistry
  • Dimethylpolysiloxanes / chemistry
  • Equipment Design
  • Microfluidic Analytical Techniques / instrumentation*
  • Potassium Chloride / chemistry
  • Printing
  • Sodium Chloride / chemistry
  • Systems Integration*
  • Transducers*
  • Water / chemistry

Substances

  • Alcohols
  • Dimethylpolysiloxanes
  • Water
  • Sodium Chloride
  • baysilon
  • Potassium Chloride