Optimization and characterization of a highly-efficient diffraction nanograting for MHz XUV pulses

Opt Express. 2011 Jan 31;19(3):1954-62. doi: 10.1364/OE.19.001954.

Abstract

We designed, fabricated and characterized a nano-periodical highly-efficient blazed grating for extreme-ultraviolet (XUV) radiation. The grating was optimized by the rigorous coupled-wave analysis method (RCWA) and milled into the top layer of a highly-reflective mirror for IR light. The XUV diffraction efficiency was determined to be around 20% in the range from 35.5 to 79.2 nm. The effects of the nanograting on the reflectivity of the IR light and non-linear effects introduced by the nanograting have been measured and are discussed.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Equipment Design
  • Equipment Failure Analysis
  • Nanotechnology / instrumentation*
  • Refractometry / instrumentation*
  • Signal Processing, Computer-Assisted / instrumentation*
  • Ultraviolet Rays