A hybrid PDMS-Parylene subdural multi-electrode array

Biomed Microdevices. 2013 Jun;15(3):437-43. doi: 10.1007/s10544-013-9743-2.

Abstract

In this paper, we report on a cost effective and simple method for fabricating a flexible multi-electrode array for subdural neural recording. The electrode was fabricated using a PDMS-Parylene bilayer to combine the major advantages of both materials. Mechanical and electrical characterizations were performed to confirm functionality of a 16-site electrode array under various flexed/bent conditions. The electrode array was helically wound around a 3 mm diameter cylindrical tube and laid over a 2 cm diameter sphere while maintaining its recording capability. Experimental results showed impedance values between 300 kΩ and 600 kΩ at 1 kHz for 90 μm diameter gold recording sites. Acoustically evoked neural activity was successfully recorded from rat auditory cortex, confirming in vivo functionality.

Publication types

  • Research Support, N.I.H., Extramural

MeSH terms

  • Animals
  • Dimethylpolysiloxanes / chemistry*
  • Electricity
  • Electrophysiological Phenomena
  • Mechanical Phenomena
  • Microelectrodes
  • Microtechnology / instrumentation*
  • Polymers / chemistry*
  • Rats
  • Subdural Space
  • Xylenes / chemistry*

Substances

  • Dimethylpolysiloxanes
  • Polymers
  • Xylenes
  • parylene
  • baysilon