Chemical Vapor Deposition of Large-Sized Hexagonal WSe₂ Crystals on Dielectric Substrates

Jianyi Chen; Bo Liu; Yanpeng Liu; Wei Tang; Chang Tai Nai; Linjun Li; Jian Zheng; Libo Gao; Yi Zheng; Hyun Suk Shin; Hu Young Jeong; Kian Ping Loh

doi:10.1002/adma.201503446

Chemical Vapor Deposition of Large-Sized Hexagonal WSe₂ Crystals on Dielectric Substrates

Adv Mater. 2015 Nov;27(42):6722-7. doi: 10.1002/adma.201503446. Epub 2015 Sep 28.

Authors

Jianyi Chen¹, Bo Liu¹, Yanpeng Liu¹, Wei Tang¹, Chang Tai Nai¹, Linjun Li¹, Jian Zheng¹, Libo Gao¹, Yi Zheng¹, Hyun Suk Shin², Hu Young Jeong², Kian Ping Loh¹

Affiliations

¹ Centre for Advanced 2D Materials and Graphene Research Centre, Department of Chemistry, National University of Singapore, 6 Science Drive 2, 117546, Singapore.
² Department of Chemistry, Department of Energy Engineering, Low Dimensional Carbon Materials Center, UNIST Central Research Facilities (UCRF) and Center for Multidimensional Carbon Materials, Institute of Basic Science, Ulsan National Institute of Science and Technology (UNIST), UNIST-gil 50, Ulsan, 689-798, South Korea.

PMID: 26414106
DOI: 10.1002/adma.201503446

Abstract

High-quality large-sized hexagoal WSe2 crystals can be grown on dielectric substrates using atmospheric chemical vapor deposition in the presence of hydrogen gas. These hexagonal crystals (lateral width >160 um) have a carrier mobility of 100 cm(2) V(-1) s(-1) and a photoresponsivity of ≈1100 mA W(-1), which is comparable to that of exfoliated flakes.

Keywords: hexagonal crystals; transition metal dichalcogenides; tungsten diselenide.