High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments

Hoang-Phuong Phan; Toan Dinh; Tuan-Khoa Nguyen; Afzaal Qamar; Thanh Nguyen; Van Thanh Dau; Jisheng Han; Dzung Viet Dao; Nam-Trung Nguyen

doi:10.1016/j.jhazmat.2020.122486

High temperature silicon-carbide-based flexible electronics for monitoring hazardous environments

J Hazard Mater. 2020 Jul 15:394:122486. doi: 10.1016/j.jhazmat.2020.122486. Epub 2020 Mar 20.

Authors

Hoang-Phuong Phan¹, Toan Dinh², Tuan-Khoa Nguyen³, Afzaal Qamar⁴, Thanh Nguyen³, Van Thanh Dau⁵, Jisheng Han³, Dzung Viet Dao⁵, Nam-Trung Nguyen³

Affiliations

¹ Queensland Micro and Nanotechnology Centre, Griffith University, Queensland, Australia. Electronic address: h.phan@griffith.edu.au.
² Queensland Micro and Nanotechnology Centre, Griffith University, Queensland, Australia; School of Engineering, University of Southern Queensland, Queensland, Australia.
³ Queensland Micro and Nanotechnology Centre, Griffith University, Queensland, Australia.
⁴ Electrical Engineering and Computer Science, University of Michigan, MI, USA.
⁵ Queensland Micro and Nanotechnology Centre, Griffith University, Queensland, Australia; School of Engineering and Built Environment, Griffith University, Queensland, Australia.

PMID: 32234659
DOI: 10.1016/j.jhazmat.2020.122486

Abstract

With its unprecedented properties over conventional rigid platforms, flexible electronics have been a significant research topic in the last decade, offering a broad range of applications from bendable display, flexible solar-energy systems, to soft implantable-devices for health monitoring. Flexible electronics for harsh and hazardous environments have also been extensively investigated. In particular, devices with stretchability and bend-ability as well as tolerance to extreme and toxic operating conditions are imperative. This work presents silicon carbide grown on silicon and then transferred onto polyimide substrate as a new platform for flexible sensors for hostile environments. Combining the excellent electrical properties of SiC and high temperature tolerance of polyimide, we demonstrated for the first time a flexible SiC sensors that can work above 400 °C. This new sensing platform opens exciting opportunities toward flexible sensing applications in hazardous environments.

Keywords: Environment monitoring; Flexible electronics; Hazardous environments; Silicon carbide.

Publication types

Research Support, Non-U.S. Gov't