Precise pitch-scaling of carbon nanotube arrays within three-dimensional DNA nanotrenches

Wei Sun; Jie Shen; Zhao Zhao; Noel Arellano; Charles Rettner; Jianshi Tang; Tianyang Cao; Zhiyu Zhou; Toan Ta; Jason K Streit; Jeffrey A Fagan; Thomas Schaus; Ming Zheng; Shu-Jen Han; William M Shih; Hareem T Maune; Peng Yin

doi:10.1126/science.aaz7440

Precise pitch-scaling of carbon nanotube arrays within three-dimensional DNA nanotrenches

Science. 2020 May 22;368(6493):874-877. doi: 10.1126/science.aaz7440.

Authors

Wei Sun^#^{1

2}, Jie Shen^#^{3

2}, Zhao Zhao^#^{3

4

5}, Noel Arellano⁶, Charles Rettner⁶, Jianshi Tang⁷, Tianyang Cao³, Zhiyu Zhou³, Toan Ta⁶, Jason K Streit⁸, Jeffrey A Fagan⁸, Thomas Schaus^{3

2}, Ming Zheng⁸, Shu-Jen Han⁷, William M Shih^{3

4

5}, Hareem T Maune⁶, Peng Yin^{1

2}

Affiliations

¹ Wyss Institute for Biologically Inspired Engineering, Harvard University, Boston, MA 02115, USA. py@hms.harvard.edu sunwedaivd1@gmail.com.
² Department of Systems Biology, Harvard Medical School, Boston, MA 02115, USA.
³ Wyss Institute for Biologically Inspired Engineering, Harvard University, Boston, MA 02115, USA.
⁴ Department of Cancer Biology, Dana-Farber Cancer Institute, Harvard Medical School, Boston, MA 02115, USA.
⁵ Department of Biological Chemistry and Molecular Pharmacology, Harvard Medical School, Boston, MA 02115, USA.
⁶ IBM Almaden Research Center, San Jose, CA 95120, USA.
⁷ IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598, USA.
⁸ Materials Science and Engineering Division, National Institute of Standards and Technology (NIST), Gaithersburg, MD 20899, USA.

^# Contributed equally.

PMID: 32439790
DOI: 10.1126/science.aaz7440

Abstract

Precise fabrication of semiconducting carbon nanotubes (CNTs) into densely aligned evenly spaced arrays is required for ultrascaled technology nodes. We report the precise scaling of inter-CNT pitch using a supramolecular assembly method called spatially hindered integration of nanotube electronics. Specifically, by using DNA brick crystal-based nanotrenches to align DNA-wrapped CNTs through DNA hybridization, we constructed parallel CNT arrays with a uniform pitch as small as 10.4 nanometers, at an angular deviation <2° and an assembly yield >95%.

Publication types

Research Support, U.S. Gov't, Non-P.H.S.