The studies on wet chemical etching via in situ liquid cell TEM

Abstract

Wet chemical etching is a widely used process to fabricate fascinating nanomaterials, such as nanoparticles with precisely controlled size and shape. Understanding the etching mechanism and kinetic evolution process is crucial for controlling wet chemical etching. The development of in situ liquid cell transmission electron microscopy (LCTEM) enables the study on wet chemical etching with high temporal and spatial resolutions. However, there still lack a detailed literature review on the wet chemical etching studies by in situ LCTEM. In this review, we summarize the studies on wet etching nanoparticles, one-dimensional nanomaterials and nanoribbons by in situ LCTEM, including etching rate, anisotropic etching, morphology evolution process, and etching mechanism. The challenges and opportunities of in situ LCTEM are also discussed.

Keywords: Etching one-dimensional nanomaterials; Galvanic replacement reaction; In situ liquid cell TEM; Size effect of etching rate; Wet chemical etching.