High-performance and low-power source-gated transistors enabled by a solution-processed metal oxide homojunction

Proc Natl Acad Sci U S A. 2023 Jan 17;120(3):e2216672120. doi: 10.1073/pnas.2216672120. Epub 2023 Jan 11.

Abstract

Cost-effective fabrication of mechanically flexible low-power electronics is important for emerging applications including wearable electronics, artificial intelligence, and the Internet of Things. Here, solution-processed source-gated transistors (SGTs) with an unprecedented intrinsic gain of ~2,000, low saturation voltage of +0.8 ± 0.1 V, and a ~25.6 μW power consumption are realized using an indium oxide In2O3/In2O3:polyethylenimine (PEI) blend homojunction with Au contacts on Si/SiO2. Kelvin probe force microscopy confirms source-controlled operation of the SGT and reveals that PEI doping leads to more effective depletion of the reverse-biased Schottky contact source region. Furthermore, using a fluoride-doped AlOx gate dielectric, rigid (on a Si substrate) and flexible (on a polyimide substrate) SGTs were fabricated. These devices exhibit a low driving voltage of +2 V and power consumption of ~11.5 μW, yielding inverters with an outstanding voltage gain of >5,000. Furthermore, electrooculographic (EOG) signal monitoring can now be demonstrated using an SGT inverter, where a ~1.0 mV EOG signal is amplified to over 300 mV, indicating significant potential for applications in wearable medical sensing and human-computer interfacing.

Keywords: EOG monitoring; Kelvin probe force microscopy; metal oxide–polymer blend material; solution processing; source-gated transistor (SGT).

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Artificial Intelligence*
  • Automobile Driving*
  • Electric Power Supplies
  • Humans
  • Oxides
  • Polyethyleneimine
  • Silicon Dioxide

Substances

  • Silicon Dioxide
  • Oxides
  • Polyethyleneimine