Nanoimprint lithography for nanophotonics in silicon.
Bruinink CM, Burresi M, de Boer MJ, Segerink FB, Jansen HV, Berenschot E, Reinhoudt DN, Huskens J, Kuipers L.
Bruinink CM, et al. Among authors: kuipers l.
Nano Lett. 2008 Sep;8(9):2872-7. doi: 10.1021/nl801615c. Epub 2008 Aug 12.
Nano Lett. 2008.
PMID: 18698727