Neon Ion Beam Lithography (NIBL).
Winston D, Manfrinato VR, Nicaise SM, Cheong LL, Duan H, Ferranti D, Marshman J, McVey S, Stern L, Notte J, Berggren KK.
Winston D, et al. Among authors: berggren kk.
Nano Lett. 2011 Oct 12;11(10):4343-7. doi: 10.1021/nl202447n. Epub 2011 Sep 19.
Nano Lett. 2011.
PMID: 21899279