Spacer-Defined Intrinsic Multiple Patterning.
Laney SK, Li T, Michalska M, Ramirez F, Portnoi M, Oh J, Tiwari MK, Thayne IG, Parkin IP, Papakonstantinou I.
Laney SK, et al. Among authors: michalska m.
ACS Nano. 2020 Sep 22;14(9):12091-12100. doi: 10.1021/acsnano.0c05497. Epub 2020 Aug 27.
ACS Nano. 2020.
PMID: 32813489
Free article.