Low-Temperature Atomic Layer Deposition of MoS2 Films.
Jurca T, Moody MJ, Henning A, Emery JD, Wang B, Tan JM, Lohr TL, Lauhon LJ, Marks TJ.
Jurca T, et al. Among authors: henning a.
Angew Chem Int Ed Engl. 2017 Apr 24;56(18):4991-4995. doi: 10.1002/anie.201611838. Epub 2017 Apr 3.
Angew Chem Int Ed Engl. 2017.
PMID: 28371057