Ellingboe AR - Search Results

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Silicon Nitride Deposition for Flexible Organic Electronic Devices by VHF (162 MHz)-PECVD Using a Multi-Tile Push-Pull Plasma Source.

Kim KS, Kim KH, Ji YJ, Park JW, Shin JH, Ellingboe AR, Yeom GY. Kim KS, et al. Among authors: ellingboe ar. Sci Rep. 2017 Oct 19;7(1):13585. doi: 10.1038/s41598-017-14122-4. Sci Rep. 2017. PMID: 29051604 Free PMC article.

Characteristics of silicon nitride deposited by very high frequency (162 MHz)-plasma enhanced atomic layer deposition using bis(diethylamino)silane.

Byun JY, Ji YJ, Kim KH, Kim KS, Tak HW, Ellingboe AR, Yeom GY. Byun JY, et al. Among authors: ellingboe ar. Nanotechnology. 2021 Feb 12;32(7):075706. doi: 10.1088/1361-6528/abb974. Nanotechnology. 2021. PMID: 32942270

Deposition of Very-Low-Hydrogen-Containing Silicon at a Low Temperature Using Very-High-Frequency (162 MHz) SiH₄ Plasma.

Kim KS, Ji YJ, Kim KH, Kang JE, Ellingboe AR, Yeom GY. Kim KS, et al. Among authors: ellingboe ar. Micromachines (Basel). 2022 Jan 24;13(2):173. doi: 10.3390/mi13020173. Micromachines (Basel). 2022. PMID: 35208298 Free PMC article.

Plasma Enhanced Atomic Layer Deposition of Silicon Nitride for Two Different Aminosilane Precursors Using Very High Frequency (162 MHz) Plasma Source.

Ji YJ, Kim HI, Choi SY, Kang JE, Ellingboe AR, Chandra H, Lee CW, Yeom GY. Ji YJ, et al. Among authors: ellingboe ar. ACS Appl Mater Interfaces. 2023 Jun 14;15(23):28763-28771. doi: 10.1021/acsami.3c02950. Epub 2023 Jun 3. ACS Appl Mater Interfaces. 2023. PMID: 37269552

Plasma enhanced atomic layer deposition of silicon nitride using magnetized very high frequency plasma.

Ji YJ, Kim HI, Kang JE, Choi SY, Kim KH, Kim DS, Ellingboe AR, Kim HM, Yeom GY, Kim DW. Ji YJ, et al. Among authors: ellingboe ar. Nanotechnology. 2024 Apr 18;35(27). doi: 10.1088/1361-6528/ad3740. Nanotechnology. 2024. PMID: 38522102

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