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High-Performance Thin-Film Transistor with Atomic Layer Deposition (ALD)-Derived Indium-Gallium Oxide Channel for Back-End-of-Line Compatible Transistor Applications: Cation Combinatorial Approach.
Hur JS, Kim MJ, Yoon SH, Choi H, Park CK, Lee SH, Cho MH, Kuh BJ, Jeong JK. Hur JS, et al. Among authors: kim mj. ACS Appl Mater Interfaces. 2022 Nov 2;14(43):48857-48867. doi: 10.1021/acsami.2c13489. Epub 2022 Oct 19. ACS Appl Mater Interfaces. 2022. PMID: 36259658
9,191 results