Ultrathin ferroic HfO2-ZrO2 superlattice gate stack for advanced transistors.
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Cheema SS, et al. Among authors: song wb.
Nature. 2022 Apr;604(7904):65-71. doi: 10.1038/s41586-022-04425-6. Epub 2022 Apr 6.
Nature. 2022.
PMID: 35388197