Cryo-ePDF: Overcoming Electron Beam Damage to Study the Local Atomic Structure of Amorphous ALD Aluminum Oxide Thin Films within a TEM.
Jasim AM, He X, Xing Y, White TA, Young MJ.
Jasim AM, et al. Among authors: he x.
ACS Omega. 2021 Mar 25;6(13):8986-9000. doi: 10.1021/acsomega.0c06124. eCollection 2021 Apr 6.
ACS Omega. 2021.
PMID: 33842769
Free PMC article.
Previous work demonstrated measurement of how the local atomic structure of ALD-grown aluminum oxide (AlO (x) ) evolves in operando during growth by employing synchrotron high-energy X-ray diffraction (HE-XRD). ...We employ cryo-ePDF and reverse Monte Carlo ( …
Previous work demonstrated measurement of how the local atomic structure of ALD-grown aluminum oxide (AlO (x) ) evolves in operando d …