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Shadow-wall lithography of ballistic superconductor-semiconductor quantum devices.
Heedt S, Quintero-Pérez M, Borsoi F, Fursina A, van Loo N, Mazur GP, Nowak MP, Ammerlaan M, Li K, Korneychuk S, Shen J, van de Poll MAY, Badawy G, Gazibegovic S, de Jong N, Aseev P, van Hoogdalem K, Bakkers EPAM, Kouwenhoven LP. Heedt S, et al. Among authors: ammerlaan m. Nat Commun. 2021 Aug 13;12(1):4914. doi: 10.1038/s41467-021-25100-w. Nat Commun. 2021. PMID: 34389705 Free PMC article.