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Systematic Characterization of Plasma-Etched Trenches on 4H-SiC Wafers.
Pirnaci MD, Spitaleri L, Tenaglia D, Perricelli F, Fragalà ME, Bongiorno C, Gulino A. Pirnaci MD, et al. ACS Omega. 2021 Jul 28;6(31):20667-20675. doi: 10.1021/acsomega.1c02905. eCollection 2021 Aug 10. ACS Omega. 2021. PMID: 34396012 Free PMC article.