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Study of Cryogenic Unmasked Etching of "Black Silicon" with Ar Gas Additives.
Vyacheslavova EA, Morozov IA, Kudryashov DA, Uvarov AV, Baranov AI, Maksimova AA, Abolmasov SN, Gudovskikh AS. Vyacheslavova EA, et al. Among authors: abolmasov sn. ACS Omega. 2022 Feb 8;7(7):6053-6057. doi: 10.1021/acsomega.1c06435. eCollection 2022 Feb 22. ACS Omega. 2022. PMID: 35224366 Free PMC article.