Novel fabrication tools for dynamic compression targets with engineered voids using photolithography methods.
Pandolfi S, Carver T, Hodge D, Leong AFT, Kurzer-Ogul K, Hart P, Galtier E, Khaghani D, Cunningham E, Nagler B, Lee HJ, Bolme C, Ramos K, Li K, Liu Y, Sakdinawat A, Marchesini S, Kozlowski PM, Curry CB, Decker FJ, Vetter S, Shang J, Aluie H, Dayton M, Montgomery DS, Sandberg RL, Gleason AE.
Pandolfi S, et al. Among authors: shang j.
Rev Sci Instrum. 2022 Oct 1;93(10):103502. doi: 10.1063/5.0107542.
Rev Sci Instrum. 2022.
PMID: 36319339