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Machine learning force field for thermal oxidation of silicon.
Cvitkovich L, Fehringer F, Wilhelmer C, Milardovich D, Waldhör D, Grasser T. Cvitkovich L, et al. Among authors: milardovich d. J Chem Phys. 2024 Oct 14;161(14):144706. doi: 10.1063/5.0220091. J Chem Phys. 2024. PMID: 39387410