Effect of Mask Geometry Variation on Plasma Etching Profiles.
Bobinac J, Reiter T, Piso J, Klemenschits X, Baumgartner O, Stanojevic Z, Strof G, Karner M, Filipovic L.
Bobinac J, et al. Among authors: filipovic l.
Micromachines (Basel). 2023 Mar 16;14(3):665. doi: 10.3390/mi14030665.
Micromachines (Basel). 2023.
PMID: 36985072
Free PMC article.