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Fabrication of Buried Microchannels with Almost Circular Cross-Section Using HNA Wet Etching.
Micromachines (Basel). 2024 Sep 30;15(10):1230. doi: 10.3390/mi15101230.
Micromachines (Basel). 2024.
PMID: 39459103
Free PMC article.
Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching.
Yu Q, Bonnema MJS, Yariesbouei M, Wiegerink RJ, Lötters JC.
Yu Q, et al.
Sensors (Basel). 2024 Dec 12;24(24):7952. doi: 10.3390/s24247952.
Sensors (Basel). 2024.
PMID: 39771690
Free article.
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