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SU-8 force sensing pillar arrays for biological measurements.
Doll JC, Harjee N, Klejwa N, Kwon R, Coulthard SM, Petzold B, Goodman MB, Pruitt BL. Doll JC, et al. Lab Chip. 2009 May 21;9(10):1449-54. doi: 10.1039/b818622g. Epub 2009 Feb 27. Lab Chip. 2009. PMID: 19417913 Free PMC article.
Review: Semiconductor Piezoresistance for Microsystems.
Barlian AA, Park WT, Mallon JR Jr, Rastegar AJ, Pruitt BL. Barlian AA, et al. Proc IEEE Inst Electr Electron Eng. 2009;97(3):513-552. doi: 10.1109/JPROC.2009.2013612. Proc IEEE Inst Electr Electron Eng. 2009. PMID: 20198118 Free PMC article.